GHULGHAZARYAN, R. G.; PILIPOSYAN, . D. G.; SHOYAN, M. T.; NERSISYAN, H. V. Application of Machine Learning-Based Electrochemical Deposition Models to CMP Modeling. Mathematical Problems of Computer Science, [S. l.], v. 53, p. 39–48, 2021. DOI: 10.51408/1963-0051. Disponível em: http://mpcs.sci.am/index.php/mpcs/article/view/19. Acesso em: 3 may. 2024.